MEMS & NEMS
MEMS or micro-electro-mechanical systems and NEMS, nano-electro-mechanical systems are fabricated and tested using modified semiconductor fabrication technologies. Testing MEMS creates unique challenges as they often require non-electrical stimulation or measurement. We have many years of experience testing MEMS and NEMS of all varieties.

Some Common MEMS

Sensors, actuators, switches, relays, acoustical, ...

BioMEMS / Microfluidics

Flow concentrators, sensing and processing tiny amounts of liquids and gases

RF MEMS

Resonators, Oscillators, Filters, Switches,...

Micro Optics

MEMS Optical Microphone, Nano-Grating Based Low-G Inertial Sensor