MEMS (Micro-electro-mechanical systems), MOEMS (Micro-optical electro-mechanical systems) and NEMS (Nano-electro-mechanical systems) are fabricated and tested using modified semiconductor fabrication technologies. Testing MEMS creates unique challenges as they often require electrical and non-electrical stimulation or measurement via optical, HF and mechanical methods. A variety of electrical and mechanical instruments are often interfaced to the probe system. With capabilities including double sided probing, vacuum, cryo, and other environmental test modules, the Probe System for Life ® (PS4L) delivers a comprehensive platform for testing MEMS, MOEMS and NEMS of all varieties from research to volume production. SemiProbe has extensive experience testing MEMS devices in a vacuum environment and has developed automated vacuum probing systems with material handling and up to four probing modules.