SemiProbe Develops Fully Automatic Electro-Optical Probe System

August 22, 2017


FOR IMMEDIATE RELEASE                                          Contact: Zach Chernick
     413.575.0934 | [email protected]

SemiProbe, Inc. manufactured and installed a 200 mm Fully Automatic Electro-Optical Probe System for VTT, a leading research and technology organization in Europe.

WINOOSKI, VT – July 19, 2017 – SemiProbe, Inc. installed a 200 mm Fully Automatic Electro-Optical Probe System at VTT Technical Research Centre of Finland Ltd., a primary research and technology organization in Europe.

VTT has Silicon Photonics design and foundry capabilities. They will use the Fully Automatic Probe System to perform automatic and simultaneous Electro-Optical tests at Wafer Level (E/O WLT). These tests support VTT’s SiPh volume production activities and offer advanced E/O test services to other users.

SemiProbe built the system using their patented Probe System for Life (PS4L) architecture. Using PS4L technology, customers can easily re-configure the system to add new modules and accessories as requirements change. These changes are made via field upgrades and are a fraction of the cost in comparison to purchasing a new system.

This FA-8 Fully Automatic Electro-Optical Probe System consists of four multi-axis programmable manipulators that provide automatic fiber optic alignment and electrical contact. Two of the manipulators are six axis (X, Y, Z, roll, pitch and yaw) SmarAct Hexapods with unique fiber and height measurement capabilities. The other two programmable 3 axis (X, Y and Z) manipulators provide nm accuracy, repeatability and resolution specifications.

The entire system; including the prober, material handling unit and manipulators are remotely controlled through a customer developed Graphical Unit Interface (GUI) using LabView. This probe system will handle 150 mm (6”) and 200 mm (8”) wafers and can be operated in manual, semiautomatic and automatic modes.

“We are excited to use the cassette-to-cassette automatic PS4L probing station where we contribute our unique fiber probing and alignment know-how,” said Giovanni Delrosso, senior scientist and project manager at VTT’s Photonics Integration team in Espoo.

VTT has developed Silicon Photonics since 1997 and is one of the field’s pioneers. The capability to perform simultaneous E/O tests at wafer level and provide fast data collection for analytics enables VTT to offer improved manufacturing and testing services to its customers.

Dr. Timo Aalto, SiPh pioneer and team leader at VTT commented, “In the past few years, SiPh has been one of the fastest growing areas at VTT. In 2016, we delivered thousands of SiPh chips for our customers, and, in 2018, the targeted volume of tested chips is over one million. E/O WLT is therefore vital in our R&D and manufacturing value chains. VTT provides R&D and IPR licensing services, while contract manufacturing services are delivered via VTT Memsfab Ltd.”

Denis Place, SemiProbe founder & vp of sales & marketing, stated “The keys to providing unique, first of a kind application specific probing solutions is to have a skilled team, a flexible probing platform and to work closely with the customer to develop the solution.”

About SemiProbe
SemiProbe, Inc. is a worldwide leader in the design and production of probing and inspection systems to the semiconductor industry. We provide the most modular and flexible probing and inspection platforms available today. Our global customer base includes universities, government research labs and a wide range of high technology companies.

About VTT
VTT Technical Research Centre of Finland Ltd. is a state owned and controlled non-profit limited liability company established by law and operating under the ownership steering of the Finnish Ministry of Employment and the Economy. VTT utilizes the Micronova Research facility in Espoo (Helsinki) with the largest R&D cleanroom in Nordic countries fully equipped for fabrication of silicon based microstructures. It is recognized as a National Research Infrastructure in Finland.


Contact Us


276 E. Allen Street
Winooski, VT 05404


[email protected]


(802) 860-7000